These oscillations, in turn, produce ultrasonic waves in the piezoelectric plate.Ī coupling, or pusher, is attached to the plate and preloaded against a longitudinal rod (also referred to as a runner). When an electric charge is applied, the plate is excited at its resonance frequency, causing it to oscillate. Ultrasonic piezo motors use a single piezoelectric plate. Image credit: MICROMO Linear ultrasonic piezo motor function This diagram of the Piezo Legs motor from MICROMO shows how pairs of legs work together to produce motion in a longitudinal rod. The legs of linear stepper motors move only a few microns at a time, but they run at hundreds to thousands of hertz to produce continuous linear motion. When the first pair of legs releases, the next pair takes over. To generate linear motion, one pair of legs “grips” a longitudinal rod via friction, moving it forward as the legs extend and bend. Linear stepper motors are based on the coordinated motion of several piezo elements that are mounted in a row and act as pairs of “legs.” When an electrical charge is applied, the legs experience two motions: extension/retraction and sideways bending. The inverse (aka reverse or transverse) piezoelectric effect converts applied electrical energy into internal mechanical strain. The piezoelectric effect is the conversion of applied mechanical force to internal electrical energy. Both use the inverse piezoelectric effect to activate a rod or pusher and create linear motion, but the way in which they employ and harness motion from piezo elements differs. Two common types are linear stepper and linear ultrasonic piezo motors. These advantages make these ceramic motors a great choice in various fields, including microscopy, nanotechnology, semiconductor manufacturing, optics, and biomedical applications.įor ultra-precise, short travel and high-speed scanning operation, piezo flexure stages and mechanisms are recommended.There are a number of ways in which piezo ceramics can be used to create linear motion, providing any combination of high speed, long travel, and high force. Self-clamping: Due to the design principle, piezo motors are self-clamping at rest, without the need for a brake mechanism, a decisive advantage in applications that require very stable positioning without servo jitter.Their small size and low mass also contribute to their high dynamic performance. Compact and Lightweight: Piezo motors can be designed to be more compact and lightweight compared to traditional motors, making them well-suited for applications with limited space or weight restrictions.Non-Magnetic and Vacuum Compatibility: Piezo motors are non-magnetic and do not generate magnetic fields during operation, making them suitable for applications where magnetic interference is a concern. This results in reduced friction, backlash, and improved precision and reliability.
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